Nanoscale space charge generation in local oxidation nanolithography
نویسندگان
چکیده
منابع مشابه
Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces
The integration of atomically-thin layers of two dimensional (2D) materials in nanodevices demands for precise techniques at the nanoscale permitting their local modification, structuration or resettlement. Here, we present the use of Local Oxidation Nanolithography (LON) performed with an Atomic Force Microscope (AFM) for the patterning of nanometric motifs on different metallic Transition Met...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2010
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.3459976